A Self-Calibrating Mathematical Model for the Direct Piezoelectric Effect of a New MEMS Tilt Sensor

  title={A Self-Calibrating Mathematical Model for the Direct Piezoelectric Effect of a New MEMS Tilt Sensor},
  author={P. M. Moubarak and P. Ben-Tzvi and M. Zaghloul},
  journal={IEEE Sensors Journal},
  • P. M. Moubarak, P. Ben-Tzvi, M. Zaghloul
  • Published 2012
  • Engineering
  • IEEE Sensors Journal
  • This paper presents a self-calibrating mathematical model and simulation results of the direct piezoelectric effect of a new tilt-sensor that measures inclination angles around two orthogonal axes. Using a fundamental description of the mechanical stress generated in suspended beams under static loading, we propose a model of the sensor's direct piezoelectric effect that is only a trigonometric function of its genetic behavior in two orthogonal planes. The significance of the proposed approach… CONTINUE READING
    22 Citations

    Figures from this paper

    A self-calibrating temperature independent model of a bi-axial piezoelectric MEMS tilt sensor
    • 1
    • PDF
    Piezoelectric Response of Ferroelectric Ceramics Under Mechanical Stress
    • 1
    • PDF


    Design and analysis of a new piezoelectric MEMS tilt sensor
    • 11
    • PDF
    Single- and Triaxis Piezoelectric-Bimorph Accelerometers
    • 75
    MEMS inclinometer based on a novel piezoresistor structure
    • 32
    Behavior of soft piezoelectric ceramics under high sinusoidal electric fields
    • 83
    Fatigue response of a PZT multilayer actuator under high-field electric cycling with mechanical preload
    • 19
    Modeling for temperature compensation and temperature characterizations of BAW resonators at GHz frequencies
    • 37
    Drift in Posturography Systems Equipped With a Piezoelectric Force Platform: Analysis and Numerical Compensation
    • 13
    Temperature dependence of the complex effective piezoelectric coefficient of ferroelectric 0-3 composites
    • 6
    • PDF