A Self-Calibrating Mathematical Model for the Direct Piezoelectric Effect of a New MEMS Tilt Sensor

  title={A Self-Calibrating Mathematical Model for the Direct Piezoelectric Effect of a New MEMS Tilt Sensor},
  author={Paul M. Moubarak and Pinhas Ben-Tzvi and Mona E. Zaghloul},
  journal={IEEE Sensors Journal},
This paper presents a self-calibrating mathematical model and simulation results of the direct piezoelectric effect of a new tilt-sensor that measures inclination angles around two orthogonal axes. Using a fundamental description of the mechanical stress generated in suspended beams under static loading, we propose a model of the sensor's direct piezoelectric effect that is only a trigonometric function of its genetic behavior in two orthogonal planes. The significance of the proposed approach… Expand
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Design and analysis of a new piezoelectric MEMS tilt sensor
  • P. Moubarak, P. Ben-Tzvi
  • Computer Science
  • 2011 IEEE International Symposium on Robotic and Sensors Environments (ROSE)
  • 2011
The proposed tilt sensor consists of a Platinum supported beam with a central proof mass which causes the beam to deflect under gravitational loading, which generates intrinsic stress across the beam, which is a direct function of the dual-axis inclination of the sensor. Expand
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