A Self-Calibrating Mathematical Model for the Direct Piezoelectric Effect of a New MEMS Tilt Sensor

@article{Moubarak2012ASM,
  title={A Self-Calibrating Mathematical Model for the Direct Piezoelectric Effect of a New MEMS Tilt Sensor},
  author={Paul M. Moubarak and Pinhas Ben-Tzvi and Mona E. Zaghloul},
  journal={IEEE Sensors Journal},
  year={2012},
  volume={12},
  pages={1033-1042}
}
This paper presents a self-calibrating mathematical model and simulation results of the direct piezoelectric effect of a new tilt-sensor that measures inclination angles around two orthogonal axes. Using a fundamental description of the mechanical stress generated in suspended beams under static loading, we propose a model of the sensor's direct piezoelectric effect that is only a trigonometric function of its genetic behavior in two orthogonal planes. The significance of the proposed approach… Expand
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