A Salicided Flash EEPROM for Embedded Memory Applications

Abstract

Salicide is currently used in sub-half-micron CMOS logic devices, but has not been used till now for Non Volatile Memories, because of reliability concerns. In this paper we report the realisation of a Flash memory cell in a 0.5¿m salicided CMOS process. Writing and erasing characteristics are full comparable with non-salicided technology, and preliminary… (More)

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