A SU8 Micromachined WR-1.5 Band Waveguide Filter

@article{Shang2013ASM,
  title={A SU8 Micromachined WR-1.5 Band Waveguide Filter},
  author={Xiaobang Shang and Yingtao Tian and Michael J. Lancaster and Sarabjot Singh},
  journal={IEEE Microwave and Wireless Components Letters},
  year={2013},
  volume={23},
  pages={300-302}
}
A WR-1.5 band (500-750 GHz) waveguide 3rd order bandpass filter has been designed, fabricated, using SU8 photoresist technology, tested and presented. The filter is composed of three silver-coated SU8 layers, each of the same nominal thickness of 191 μm. This filter structure is based on three offset resonators. This novel structure is ideally suitable for the layered SU8 micromachining process. The filter exhibits a 53.7 GHz 3-dB bandwidth at a central frequency of 671 GHz. The median passband… CONTINUE READING

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