A Raman study of NiO/sub x/ films for gas sensors applications

  title={A Raman study of NiO/sub x/ films for gas sensors applications},
  author={R. Srnanek and I. Hotovy and V. Malcher and A. Vincze and D. McPhail and S. Littlewood},
  journal={ASDAM 2000. Conference Proceedings. Third International EuroConference on Advanced Semiconductor Devices and Microsystems (Cat. No.00EX386)},
  • R. Srnanek, I. Hotovy, +3 authors S. Littlewood
  • Published in
    ASDAM . Conference Proceedings. Third…
  • DOI:10.1109/ASDAM.2000.889506
NiO/sub x/ films were prepared by dc reactive magnetron sputtering in an Ar+O/sub 2/ mixed atmosphere. These films were investigated by Raman spectroscopy and SIMS. It was confirmed that as we increased the ratio of oxygen in the oxygen/ argon mixture to 30-40%, the composition of the layers approached the Ni/sub 2/O/sub 3/ composition. Annealing of the layers also led to a change in composition from the nearly perfect (NiO) to a stoichiometry with an excess of O/sub 2/(/spl sim/Ni/sub 2/O/sub… CONTINUE READING

Figures from this paper.


Publications citing this paper.