A Polymer-Based Optical Switch Fabricated Using Silicon Process, Electroplating And Micro Hot Embossing

Abstract

This paper presents an 8x8 optical switch consisting of a micro cantilever array. Each cantilever, with a vertical micro mirror located on one end of it, was driven by electrostatic actuation. The optical switch was fabricated using combined silicon process, electroplating and hot embossing. The optical switch, embossed with a polymer material, was aligned… (More)
DOI: 10.1142/S1465876303002143

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@article{Shan2003APO, title={A Polymer-Based Optical Switch Fabricated Using Silicon Process, Electroplating And Micro Hot Embossing}, author={Xuechuan Shan and Ryutaro Maeda and Tsuyoshi Ikehara and Z. F. Wang and Chak-Kuen Wong}, journal={International Journal of Computational Engineering Science}, year={2003}, volume={4}, pages={724-728} }