A Plastic W-Band MEMS Tunable Filter


A plastic, W-band MEMS tunable filter has been successfully demonstrated by built-in deformable membranes. The filter has been fabricated using a MEMS-based process with plastic micro embossing process and gold electroplating. Two movable membranes of 1.6mm in diameter are designed as part of a two-cavity iris filter to actively change the cavity geometry… (More)


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@article{Sammoura2006APW, title={A Plastic W-Band MEMS Tunable Filter}, author={Firas N. Sammoura and Liwei Lin}, journal={2006 IEEE MTT-S International Microwave Symposium Digest}, year={2006}, pages={136-139} }