A Parallel Discrete-Event Simulation of Wafer Fabrication Processes

Cite this paper

@inproceedings{Lim1998APD, title={A Parallel Discrete-Event Simulation of Wafer Fabrication Processes}, author={Chu-Cheow Lim and Y. L. Low and Boon-Ping Gan and Stephen John Turner and Sanjay Jain and Wentong Cai and Wen Jing Hsu and Shell Ying Huang}, year={1998} }