A Parallel Discrete-Event Simulation of Wafer Fabrication Processes


∗ Gintic Institute of Manufacturing, 71 Nanyang Drive, Singapore 639798. Emails: {cclim,yhlow,bpooi,sjain}@gintic.gov.sg # Visiting Researcher, from Department of Computer Science, University of Exeter, Exeter, EX4 4PT, U.K. Email: steve@dcs.exeter.ac.uk + Centre for Advanced Information Systems, School of Applied Science, Nanyang Technological University… (More)


8 Figures and Tables