A PMMA-based micro pressure sensor chip using carbon nanotubes as sensing elements

Abstract

A polymer-based MEMS pressure sensor was fabricated using bulk multi-walled carbon nanotube (MWNT) as piezoresistive sensing elements. The development of the pressure sensor includes fabrication of 300/spl mu/m thick polymethylmethacrylate (PMMA) diaphragms using SU8 molding/hot-embossing technique and AC electrophoretic manipulation of MWNT bundles on the… (More)

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