A PIEZOELECTRIC MICROPUMP BASED ON MICROMACHINING

@inproceedings{Lintel1988APM,
  title={A PIEZOELECTRIC MICROPUMP BASED ON MICROMACHINING},
  author={H.T.G. van Lintel and Christiaan Van De Pol and Siebe Bouwstra},
  year={1988}
}
The design and realization of two pumps based on micromachining of silicon are described. The pumps, which are of the reciprocating displacement type, comprise one or two pump chambers, a thin glass pump membrane actuated by a piezoelectric disc and passive silicon check valves to direct the flow. Chambers, channels and valves are realized in a silicon wafer by wet chemical etching. The results of mechanical calculations and simulations show good agreement with the actual behaviour of the pumps… CONTINUE READING

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