A Numerical Investigation of the Effects of Gas-Phase Particle Formation on Silicon Film Deposition from Silane

@inproceedings{Kremer2003ANI,
  title={A Numerical Investigation of the Effects of Gas-Phase Particle Formation on Silicon Film Deposition from Silane},
  author={D. M. Kremer and Ronald W. Davis and Elizabeth F. Moore and Sheryl H Ehrman},
  year={2003}
}
  • D. M. Kremer, Ronald W. Davis, +1 author Sheryl H Ehrman
  • Published 2003
  • Chemistry
  • This paper presents a systematic numerical investigation of the effects of particle formation on silicon film deposition from silane in a vertical rotating disk chemical vapor deposition reactor. The numerical model uses the Sandia SPIN code to simulate the reacting flow and heat transfer. A moment transport aerosol model simulates the nucleation, growth and transport of silicon particles. The effects of total reactor pressure, temperature, rotation rate, inlet gas composition, and rate of… CONTINUE READING

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