A Novel Warped-Beam Design that Enhances RF Performance of Capacitive MEMS Switches

@article{AlDahleh2007ANW,
  title={A Novel Warped-Beam Design that Enhances RF Performance of Capacitive MEMS Switches},
  author={R. Al-Dahleh and R F Mansour},
  journal={2007 IEEE/MTT-S International Microwave Symposium},
  year={2007},
  pages={1813-1816}
}
This paper presents the design, fabrication and testing of a novel electrostatically actuated capacitive shunt switch for X-band applications. By introducing warped bimetallic beams within the switch's geometry, the effective capacitive area is optimized to fine-tune the switch's RF performance in the 'off' state without influencing the switch's 'on' state performance. As a result, measurements show a drastic improvement where the down-state capacitance is doubled and the up-state capacitance… CONTINUE READING

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