A Novel Piezoresistive Accelerometer with SPBs to Improve the Tradeoff between the Sensitivity and the Resonant Frequency

Abstract

For improving the tradeoff between the sensitivity and the resonant frequency of piezoresistive accelerometers, the dependency between the stress of the piezoresistor and the displacement of the structure is taken into consideration in this paper. In order to weaken the dependency, a novel structure with suspended piezoresistive beams (SPBs) is designed… (More)
DOI: 10.3390/s16020210

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Cite this paper

@inproceedings{Xu2016ANP, title={A Novel Piezoresistive Accelerometer with SPBs to Improve the Tradeoff between the Sensitivity and the Resonant Frequency}, author={Yu Xu and Libo Zhao and Zhuangde Jiang and Jianjun Ding and Niancai Peng and Yulong Zhao}, booktitle={Sensors}, year={2016} }