A Novel Filter Rating Method Using Less Than 30-nm Gold Nanoparticle and Protective Ligand

  title={A Novel Filter Rating Method Using Less Than 30-nm Gold Nanoparticle and Protective Ligand},
  author={Takehito Mizuno and Akihisa Namiki and Shuichi Tsuzuki},
  journal={IEEE Transactions on Semiconductor Manufacturing},
This paper describes a novel filter rating method beyond the current 30-nm limit by combining dynamic light scattering and inductively coupled plasma mass spectrometer technique and proposes the use of gold nanoparticle as the standard challenge particle. Furthermore, the effect of protective ligand addition is investigated in order to decrease the adsorbing effect between gold nanoparticle and membrane surface. 
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