A Novel Fabrication Process of Large Area Triangular Nanocavity Arrays by Bilayer Nanosphere Lithography

@inproceedings{Wang2012ANF,
  title={A Novel Fabrication Process of Large Area Triangular Nanocavity Arrays by Bilayer Nanosphere Lithography},
  author={Chao Wang and Hong Juan Cui and Peitao Dong and Di Di and Jian Chen and Hao Wang and Z. H. Chen and Xue Zhong Wu},
  year={2012}
}
A simple and novel self-assembly based process is presented in this paper for the fabrication of gold triangular nanocavity arrays. This process combines nanosphere lithography (NSL) with some standard MEMS technologies. A carboxylated polystyrene (PS) nanosphere bilayer with a relatively large area is fabricated on silicon wafer as the starting template by spin-coating. Oxygen plasma etching, metal deposition and lifting-off of the PS upper layer are then orderly carried out for the formation… CONTINUE READING

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