A Novel Capacitive Detection Scheme With Inherent Self-Calibration

This paper reports a novel capacitive detection method, called the sideband-ratio (SBR) detection, which is robust to variations of such critical parameters as the nominal capacitance, frequency, and amplitude of the probing voltage and gain of the transimpedance amplifier. The approach constructively utilizes the inherent nonlinearity of parallel-plate… CONTINUE READING