A New Optimal Design Technique for the Pneumatic Vibration Isolation System Implementing the Full Mathematical Analysis and Nonlinear Modeling


All precise machining and measurement equipments are much influenced by environments such as temperature, vibration, humidity, dust and so on. As for vibration, the amplitude of the vibration that resides in buildings and ground is from about 0.1 um to 10 um in general, which is bigger than the resolution of the precision equipments , and thus the vibration… (More)


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