A New Method for Robust Damping and Tracking Control of Scanning Probe Microscope Positioning Stages

@article{Fleming2010ANM,
  title={A New Method for Robust Damping and Tracking Control of Scanning Probe Microscope Positioning Stages},
  author={Andrew J. Fleming and Sumeet S. Aphale and S. O. Reza Moheimani},
  journal={IEEE Transactions on Nanotechnology},
  year={2010},
  volume={9},
  pages={438-448}
}
This paper demonstrates a simple second-order controller that eliminates scan-induced oscillation and provides integral tracking action. The controller can be retrofitted to any scanning probe microscope with position sensors by implementing a simple digital controller or operational amplifier circuit. The controller is demonstrated to improve the tracking bandwidth of an NT-MDT scanning probe microscope from 15 Hz (with an integral controller) to 490 Hz while simultaneously improving gain… CONTINUE READING

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