A NONINVASIVE OPTICAL PROBE FOR DETECTING ELECTRICAL SIGNALS IN SILICON Ie ' S

@inproceedings{Heinrich2011ANO,
  title={A NONINVASIVE OPTICAL PROBE FOR DETECTING ELECTRICAL SIGNALS IN SILICON Ie ' S},
  author={Helge Heinrich and B. Roe Hemenway and Robert A Marsland and David M. Bloom and E. L. Ginzton},
  year={2011}
}
H.K. Heinrich·, B.R. Hemenway, R.A Marsland, and D.M. Bloom E.L Ginzton Laboratory Stanford University, Stanford, CA 94305 ·T.J. Watson Research Center, mM P.O. Box 218, Yorktown Heights, NY 10598 We report using a 1.3pm(silicon-sub-bandgap) optical probing system to detect electrica1 signals in silicon integrated circuits. Free carriers within integrated active devices perturb the index of refraction of the material, and we have used a Nomarski interferometer to sense this perturbation… CONTINUE READING

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References

Publications referenced by this paper.
Showing 1-10 of 10 references

Noninvasive sheet charge density probe for integrated silicon devices

  • H. K. Heinrich, D. M. Bloom, B. R Hemenway
  • Appl. Phys. Lett 48,
  • 1987
1 Excerpt

Electrooptic sampling in GaAs integrated circuits

  • B. H. Kolner, D. M. Bloom
  • IEEE J. Quantum Electron. QE-22,
  • 1986

Internal Microwave Propagation and Distortion Characteristics of Traveling-Wave Amplifiers Studied bv Electrooptic Sampling

  • M.J.W. Rodwell, M. Riaziat, K. J. Weingarten, B. A. Auld, D. M. Bloom
  • IEEE Trans. MTT -34,
  • 1986

Measurement of real-time digital signals in a silicon bipolar junction transistor using a noninvasive optical probe

  • H. K. Heinrich, B. R. Hemenway, K. A Mcgroddy, D. M. Bloom
  • Electron. Lett. 22,
  • 1986
1 Excerpt

Direct electro-optic sampling of GaAs integrated circuits

  • KJ. Weingarten, M.J.W. Rodwell, H. K. Heinrich, B. H. Kolner, D. M. Bloom
  • Electron. Lett. 21,
  • 1985

Direct electro-optic sampling of transmission line signals propagating on a GaAs substrate,

  • B. H. Kolner, D. M. Bloom
  • Electron. Lett 20,
  • 1984

H . Y . Fan and M Becker , " Infra - red absorption of silicon "

  • Frederick Wooten
  • " Optical Properties of Solids "
  • 1972

Infra-red absorption of silicon

  • H. Y. Fan, M Becker
  • Phys. Rev. 78,
  • 1950
1 Excerpt

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