A Model for Hydrogen-Induced Piezoelectric Effect in InP HEMTs and GaAs PHEMTs

  title={A Model for Hydrogen-Induced Piezoelectric Effect in InP HEMTs and GaAs PHEMTs},
  author={Samuel D. Mertens and Jes{\'u}s A. del Alamo},
We have developed a model for the impact of the hydrogen-induced piezoelectric effect on the threshold voltage of InP HEMTs and GaAs PHEMTs. We have used two-dimensional (2-D) finite element simulations to calculate the mechanical stress caused by a Ti-containing metal gate that has expanded due to hydrogen absorption. This has allowed us to map the 2-D piezoelectric charge distribution in the semiconductor heterostructure. We then used a simple electrostatics model to calculate the impact of… CONTINUE READING
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A model for hydrogen-induced piezoelectric effect in InP HEMTs and GaAs PHEMTs

  • S. D. Mertens, J. A. del Alamo
  • Proc. Int. Conf. Indium Phosphide and Related…
  • 2001
1 Excerpt

Hydrogen degradation of InP HEMTs and GaAs PHEMTs

  • J. A. del Alamo, R. R. Blanchard, S. D. Mertens
  • Topical Workshop Heterostructure Microelectronics…
  • 2000
1 Excerpt

Mertensreceived the B.S. degree in physics engineering from the University of Ghent, Ghent, Belgium, in 1997, and the M.S.E.E

  • Webelements. Online
  • Prof. del Alamo was an NSF Presidential Young…
  • 1999

Reassessment of the piezoelectric constant in GaAs by studying the electron transport of high purity MBE-grown GaAs

  • V.W.L. Chin
  • Solid State Electron. , vol. 37, no. 7, pp. 1345…
  • 1994
1 Excerpt

Ed.,Landolt-Bornstein Numerical Data and Functional Relationships: Elastic, Piezoelectric, Pyroelectric and Piezooptic Properties

  • K.-H. Hellwege
  • New York: Springer-Verlag,
  • 1984
1 Excerpt

Piezoelectricity in zincblende- and Wurtzite-type crystals

  • K. Hubner
  • Phys. Status Solidi , vol. B 57, pp. 627–634…
  • 1973

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