Corpus ID: 108059727

A Mixed-Signal Low-Noise Sigma-Delta Interface IC for Integrated Sub-Micro-Gravity Capacitive SOI Accelerometers

  title={A Mixed-Signal Low-Noise Sigma-Delta Interface IC for Integrated Sub-Micro-Gravity Capacitive SOI Accelerometers},
  author={B. V. Amini},
An improved annular blowout preventer having a body with a central bore, an annular packer chamber facing the bore, an improved annular packer in said chamber and means for axially loading said annular packer to actuate it to closed position, said improved annular packer including a resilient annulus including an upper set of insert plates embedded in said annulus, a reaction ring embedded in the outer periphery of said annulus and means for moving said reaction ring toward said upper set of… Expand

Figures and Tables from this paper

Research on Low Power Sigma-Delta Interface Circuit used in Capacitive Micro-accelerometers
Chip-level design and implementation of a second order sigma-delta interface circuit used in capacitive micro-accelerometers is presented and results have shown the chip with area of 1.32mm 2 and power consumption of about 5mW. Expand
A High-Performance Closed-Loop Fourth-Order Sigma-Delta Micro-Machined Accelerometer
In this paper a high-performance closed-loop fourth-order sigma-delta (ΣΔ) micro-accelerometer is presented. After a introduction of sigma-delta accelerometer, system-level analysis and design of aExpand
A low-noise CMOS interface for capacitive microaccelerometers
for his guidance during the course of this research. Without his guidance in choosing the problem, planning the experimental work, and preparation of the manuscript, this work would never have beenExpand
Design of a 5mW capacitive accelerometer based on MEMS and CMOS technology
This work presents an open-loop, fully differential capacitive MEMS accelerometer implemented in CMOS technology. The mathematical model of this open-loop system is derived, which considers non-idealExpand
Minimum detectable capacitance in capacitive readout circuits
  • N. Seraji, M. Yavari
  • Engineering
  • 2011 IEEE 54th International Midwest Symposium on Circuits and Systems (MWSCAS)
  • 2011
In this paper, accurate equations are presented to calculate the capacitance resolution in the readout circuits exploiting different techniques to reduce the circuit low-frequency noise. The circuitExpand
Integrated inertial measurement units using silicon bulk-acoustic wave gyroscopes


Performance limits of a closed-loop, micro-g silicon accelerometer with deposited rigid electrodes
  • N. Yazdi, K. Najafi
  • Engineering
  • ICM 2000. Proceedings of the 12th International Conference on Microelectronics. (IEEE Cat. No.00EX453)
  • 2000
Silicon micro-g accelerometers are of increasing demand for the new generation of lightweight low cost inertial measurement units (IMUs) and microgravity measurement systems. This paper presentsExpand
An interface IC for a capacitive silicon /spl mu/g accelerometer
  • N. Yazdi, K. Najafi
  • Materials Science
  • 1999 IEEE International Solid-State Circuits Conference. Digest of Technical Papers. ISSCC. First Edition (Cat. No.99CH36278)
  • 1999
High precision accelerometers with /spl mu/g resolution have numerous applications, including inertial navigation and guidance, microgravity measurements, and GPS-aided navigators. In all theseExpand
A three-axis micromachined accelerometer with a CMOS position-sense interface and digital offset-trim electronics
This paper describes a three-axis accelerometer implemented in a surface-micromachining technology with integrated CMOS. The accelerometer measures changes in a capacitive half-bridge to detectExpand
Noise analysis and characterization of a sigma-delta capacitive silicon microaccelerometer
  • H. Kulah, J. Chae, K. Najafi
  • Physics
  • TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664)
  • 2003
This paper reports a high-sensitivity low-noise capacitive accelerometer system with one micro-g//spl radic/Hz resolution. The system operates as a 2/sup nd/-order electromechanical /spl Sigma/-/splExpand
An in-plane high-sensitivity, low-noise micro-g silicon accelerometer
  • J. Chae, H. Kulah, K. Najafi
  • The Sixteenth Annual International Conference on Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE
  • 2003
A high-sensitivity, low-noise in-plane capacitive microaccelerometer utilizing a combined bulk and surface micromachining technology is demonstrated. The accelerometer utilizes a 0.5 mm-thick, 2.4 mmExpand
An inertial-grade laterally-driven MEMS differential resonant accelerometer
Inertial-grade laterally-driven differential resonant accelerometer (DRXL), using a gap sensitive electrostatic stiffness change effect, is designed, fabricated and tested using a mixedExpand
Sub-micro-gravity capacitive SOI microaccelerometers
  • B.V. Amini, R. Abdolvand, F. Ayazi
  • Materials Science
  • The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.
  • 2005
The implementation and preliminary characterization of a new in-plane capacitive microaccelerometer with sub-micro-gravity resolution (<200ng//spl radic/Hz) and very high sensitivity (>15pF/g) isExpand
An in-plane high-sensitivity, low-noise micro-g silicon accelerometer with CMOS readout circuitry
A high-sensitivity, low-noise in-plane (lateral) capacitive silicon microaccelerometer utilizing a combined surface and bulk micromachining technology is reported. The accelerometer utilizes aExpand
Performance of MEMS inertial sensors
Advanced microfabrication techniques have produced small, low-cost silicon inertial sensors of high performance, ruggedness, and inherent symmetry. When integrated with Applications SpecificExpand
A new input switching scheme for a capacitive micro-g accelerometer
The design and implementation of a new input switching capacitive microaccelerometer interface circuit with /spl mu/g resolution is presented. The accelerometers were fabricated on 50 /spl mu/m thickExpand