A Micromachined Permalloy Magnetic Actuator Array for Micro Robotics Assembly Systems

@article{Liu1995AMP,
  title={A Micromachined Permalloy Magnetic Actuator Array for Micro Robotics Assembly Systems},
  author={Chang Liu and Thomas Tsao and Y. -S. Tai and Wenheng Liu and Peter M. Will and Chih-ming Ho},
  journal={Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95},
  year={1995},
  volume={1},
  pages={328-331}
}
Arrays of permalloy magnetic actuators have been studied for the use as precision micro robotics assembly systems. The actuator arrays have been tested for lifting and moving silicon and glass chips. The actuator unit consists of a permalloy plate 1 mm x 1 mm X 5/spl mu/m in size together with polysilicon bending supports. Experimentally, it can lift a 87 /spl mu/N (or 8.88 mg) force under a magnetic field of approximately 2 x 10/sup 4/ A/m. A proposed synchronous driving mode has been observed… CONTINUE READING

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