Corpus ID: 55223022

A MICRO POWER GENERATOR USING PECVD SIO2/SI3N4 DOUBLE-LAYER AS ELECTRET

@inproceedings{Yang2008AMP,
  title={A MICRO POWER GENERATOR USING PECVD SIO2/SI3N4 DOUBLE-LAYER AS ELECTRET},
  author={Z. Yang and J. Wang},
  year={2008}
}
This paper presented a micro power generator using PECVD SiO 2/Si3N4 double-layer as electret for harvesting vibration energy from the environment. This device was fabricated by bulk micromachining technology. The average surface potential of PECVD SiO2/Si3N4 double-layer was about -409V. The measurement results of this electret micro power generator show that the peak to peak current and power outputs were 19.2nA and 46.14pW respectively at resonance frequency of 560Hz and 3g acceleration with… Expand
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