A MEMS resonant strain sensor operated in air

@article{Wojciechowski2004AMR,
  title={A MEMS resonant strain sensor operated in air},
  author={K. Wojciechowski and B. E. Boser and A. P. Pisano},
  journal={17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest},
  year={2004},
  pages={841-845}
}
This paper describes a double-ended tuning fork (DETF) strain sensor that operates in resonance at atmospheric pressure. The sensor was driven with non-integrated, surface mount electronics that successfully mitigates the effects of feed-through capacitance. The MEMS strain sensor achieves a resolution of 0.1 microstrain (/spl mu//spl epsiv/) in a bandwidth of 10 Hz to 20 kHz. The measured phase noise floor at 300 Hz offset from the resonant frequency (217 kHz) is -100 dBc/Hz and the Allan… CONTINUE READING

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