A MEMS electrochemical bellows actuator for fluid metering applications.

  title={A MEMS electrochemical bellows actuator for fluid metering applications.},
  author={Roya Sheybani and Heidi Gensler and Ellis Meng},
  journal={Biomedical microdevices},
  volume={15 1},
We present a high efficiency wireless MEMS electrochemical bellows actuator capable of rapid and repeatable delivery of boluses for fluid metering and drug delivery applications. Nafion®-coated Pt electrodes were combined with Parylene bellows filled with DI water to form the electrolysis-based actuator. The performance of actuators with several bellows configurations was compared for a range of applied currents (1-10 mA). Up to 75 boluses were delivered with an average pumping flow rate of 114… CONTINUE READING
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