A Low-Noise Low-Offset Capacitive Sensing Amplifier for a 50-g = Hz Monolithic CMOS MEMS Accelerometer


This paper describes a CMOS capacitive sensing amplifier for a monolithic MEMS accelerometer fabricated by post-CMOS surface micromachining. This chopper stabilized amplifier employs capacitance matching with optimal transistor sizing to minimize sensor noise floor. Offsets due to sensor and circuit are reduced by ac offset calibration and dc offset… (More)

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