A Load-Lock-Compatible Nanomanipulation System for Scanning Electron Microscope

@article{Zhang2013ALN,
  title={A Load-Lock-Compatible Nanomanipulation System for Scanning Electron Microscope},
  author={Yan Liang Zhang and Yong Zhang and Changhai Ru and B. K. Chen and Yu Sun},
  journal={IEEE/ASME Transactions on Mechatronics},
  year={2013},
  volume={18},
  pages={230-237}
}
This paper presents a nanomanipulation system for operation inside scanning electron microscopes (SEM). The system is compact, making it capable of being mounted onto and demounted from an SEM through the specimen-exchange chamber (load-lock) without breaking the high vacuum of the SEM. This advance avoids frequent opening of the high-vacuum chamber, thus, incurs less contamination to the SEM, avoids lengthy pumping, and significantly eases the exchange of end effectors (e.g., nanoprobes and… CONTINUE READING
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