A Large-Displacement 3-DOF Flexure Parallel Mechanism with Decoupled Kinematics Structure


This paper proposes an XYZ-flexure parallel mechanism (FPM) with large displacement and decoupled kinematics structure. The large-displacement FPM has large motion range more than 1 mm. Moreover, the decoupled XYZ-stage has small cross-axis error and small parasitic rotation. In this study, the typical prismatic joints are investigated, and a new large… (More)
DOI: 10.1109/IROS.2006.282122


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