A Jumping Silicon Microrobot with Electrostatic Inchworm Motors and Energy Storing Substrate Springs

@article{Schindler2019AJS,
  title={A Jumping Silicon Microrobot with Electrostatic Inchworm Motors and Energy Storing Substrate Springs},
  author={Craig B. Schindler and Joseph Greenspun and Hani C. Gomez and Kristofer S. J. Pister},
  journal={2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems \& Eurosensors XXXIII (TRANSDUCERS \& EUROSENSORS XXXIII)},
  year={2019},
  pages={88-91}
}
  • Craig B. Schindler, J. Greenspun, K. Pister
  • Published 1 June 2019
  • Engineering, Physics
  • 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)
We present the first demonstration of a silicon microrobot using electrostatic inchworm motors to store mechanical energy in springs etched into the silicon substrate. The microrobot is fabricated using a two mask silicon on insulator MEMS process with a 40µm device layer and 550µm substrate. The springs in the silicon substrate can store 100µJ of energy, more than 10X greater than what has been demonstrated previously using energy storing springs in the silicon on insulator layer. 

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