A High-Sensitivity Micromechanical Electrometer Based on Mode Localization of Two Degree-of-Freedom Weakly Coupled Resonators

@article{Zhang2016AHM,
  title={A High-Sensitivity Micromechanical Electrometer Based on Mode Localization of Two Degree-of-Freedom Weakly Coupled Resonators},
  author={Hemin Zhang and Jie Huang and Weizheng Yuan and Honglong Chang},
  journal={Journal of Microelectromechanical Systems},
  year={2016},
  volume={25},
  pages={937-946}
}
  • Hemin Zhang, Jie Huang, +1 author Honglong Chang
  • Published in
    Journal of…
    2016
  • Physics
  • This paper reports a high-sensitivity resonant electrometer based on the mode localization of two degree-of-freedom weakly coupled resonators (WCRs). When charges are applied to the input electrodes, the effective stiffness of a specific resonator of the WCRs will be perturbed, leading to a drastic change in mode shape owing to the mode localization phenomenon. By measuring the shift of the amplitude ratio, the small charge fluctuation can be accurately sensed. The theoretical mode of the… CONTINUE READING

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