A High Sensitivity Electric Field Microsensor Based on Torsional Resonance

@inproceedings{Chu2018AHS,
  title={A High Sensitivity Electric Field Microsensor Based on Torsional Resonance},
  author={Zhaozhi Chu and Chunrong Peng and Ren Ren and Biyun Ling and Zhouwei Zhang and Hucheng Lei and Shanhong Xia},
  booktitle={Sensors},
  year={2018}
}
This paper proposes a high sensitivity electric field microsensor (EFM) based on torsional resonance. The proposed microsensor adopts torsional shutter, which is composed of shielding electrodes and torsional beams. The movable shielding electrodes and the fixed sensing electrodes are fabricated on the same plane and interdigitally arranged. Push-pull… CONTINUE READING