A High-Resolution MEMS Piezoelectric Strain Sensor for Structural Vibration Detection

@article{Kon2008AHM,
  title={A High-Resolution MEMS Piezoelectric Strain Sensor for Structural Vibration Detection},
  author={Stanley J. Kon and Roberto Horowitz},
  journal={IEEE Sensors Journal},
  year={2008},
  volume={8},
  pages={2027-2035}
}
This paper presents the modeling, fabrication, and testing of a high-performance dynamic strain sensor. Using microelectromechanical systems (MEMS) technology, ZnO piezoelectric microsensors are directly fabricated on silicon and steel substrates. The sensors are intended to be used as point sensors for vibration sensing without putting an extra burden on the host structures. A model that incorporates piezoelectric effects into an RC circuit, representing the sensor architecture, is developed… CONTINUE READING