A High-Performance Three-Dimensional Microheater-Based Catalytic Gas Sensor

@article{Xu2012AHT,
  title={A High-Performance Three-Dimensional Microheater-Based Catalytic Gas Sensor},
  author={Lei Xu and Tie Li and Xiuli Gao and Yuelin Wang},
  journal={IEEE Electron Device Letters},
  year={2012},
  volume={33},
  pages={284-286}
}
We report a high-performance catalytic gas sensor based on a 3-D microheater. Two catalytic gas sensors were fabricated by sol-gel process, respectively based on a 3-D microheater with a concave active membrane and a comparative 2-D microheater with a rectangular active membrane, introducing Pd-Pt as catalytic material. Test results of the sensor response to methane indicate that the output signal (ΔV), sensitivity, and signal-to-noise ratio of the 3-D microheater-based gas sensor were more… CONTINUE READING
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