A HARPSS Polysilicon Vibrating Ring Gyroscope

  title={A HARPSS Polysilicon Vibrating Ring Gyroscope},
  author={Farrokh Ayazi and Khalil Najafi},
This paper presents the design, fabrication, and testing of an 80m-thick, 1.1 mm in diameter high aspect-ratio (20:1) polysilicon ring gyroscope (PRG). The vibrating ring gyroscope was fabricated through the high aspect-ratio combined poly and single-crystal silicon MEMS technology (HARPSS). This all-silicon single-wafer technology is capable of producing… CONTINUE READING