A Flat High-frequency Scanning Micromirror

@inproceedings{Conant2000AFH,
  title={A Flat High-frequency Scanning Micromirror},
  author={Robert A. Conant and Jocelyn T. Nee and Kam Y. Lau and Richard S. Muller},
  year={2000}
}
We present the Staggered Torsional Electrostatic Combdrive (STEC) fabrication process that creates thick mirrors with hightorque actuators, thereby allowing high-speed optical scanning with large angular deflections. We have demonstrated a 550 μmdiameter mirror capable of scanning an optical angle of 24.9° at its 34 kHz resonant frequency with less than 30 nm static and dynamic deformation. The optical resolution is 350 pixels – very near the diffraction-limited resolution of 355 pixels with… CONTINUE READING
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References

Publications referenced by this paper.
Showing 1-10 of 11 references

Peuzin, “Contactless actuationof bending and torsional vibrations for 2d-opticalscanner application,

A. Garnier, T. Bourouina, +3 authors J-C
proc. Transducers ’99, • 1999
View 3 Excerpts
Highly Influenced

An electrostatically excited 2D-micro-scanning-mirror with an in-plane configuration of the driving electrodes,

H. Schenk, P. Durr, D. Kunze, H. Lakner, H. Kuck
proc. MEMS • 2000
View 1 Excerpt

A Full-Motion Video Display Using Micromachined Scanning Micromirrors," proc. Transducers

R. A. Conant, P. M. Hagelin, +3 authors R. S. Muller
1999
View 2 Excerpts

Contactless actuationof bending and torsional vibrations for 2 d - optical - scanner application

P. M. Hagelin R. A. Conant, U. Krishnamoorthy, +6 authors J-C. Peuzin
1999

McKitterick, "Bonding of silicon wafers for silicon-on-insulator,

W. P. Maszara, G. Goetz, A. Caviglia, J.B
Journal of Applied Physics, • 1988
View 1 Excerpt

Elion, Electro-Optics Handbook

H.A.G.R. Elion
1979
View 1 Excerpt

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