A Design for Combining Biological and Semiconductor Cleanrooms for Nanotechnology Research

@inproceedings{Weaver2014ADF,
  title={A Design for Combining Biological and Semiconductor Cleanrooms for Nanotechnology Research},
  author={John R. Weaver},
  year={2014}
}
Nanotechnology brings together various functional areas for interdisciplinary research, making it necessary for them to reside in a single facility. The conjoining of biology, biomedical engineering, and bio-nano-micro-electro-mechanical systems (MEMS) with semiconductor and MEMS processing requires that these technologies coexist in ultraclean facilities, while the facility designs and operating practices are incompatible. This case study describes a design concept in a collaborative research… CONTINUE READING