A Design Study for Thermal Control of a CVD Reactor for YBCO

Abstract

Active thermal control of a reactor for YBa2Cu3O7-x chemical vapor deposition is studied using a nonlinear heat transfer model validated by preliminary component testing. LQR and LQE methods are applied to the linearized model for observer-based control. Convergence rates of the controller and observer are indicated by closed-loop eigenvalues and… (More)

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