A Comprehensive Exploration of Challenges in Architecture-Based Reliability Estimation

@inproceedings{Krka2008ACE,
  title={A Comprehensive Exploration of Challenges in Architecture-Based Reliability Estimation},
  author={Ivo Krka and George T. Edwards and Leslie Cheung and Leana Golubchik and Nenad Medvidovi{\'c}},
  booktitle={WADS},
  year={2008}
}
A plasma processing apparatus such as a plasma etching apparatus, which is not subject to arcing to the gas distributor plate which is caused by secondary potentials generated by polymers adhering to a gas distribution plate. The gas distribution plate is electrically isolated from the ground electric potential, and does not have any polarity. The gas distribution plate may be formed of an insulating material. Furthermore, a support plate may be adapted to fix the gas distribution plate to a… 
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