author={L. Yu and E. Y. B. Pun and Ellis Meng},
We present the first demonstration of a passive, contactless method to interrogate electrochemical impedance (EI) via a microfabricated MEMS coil. EI measurement was achieved using the principle of reflected impedance between a pair of inductively coupled coils. Ionic concentration and electrolyte temperature were wirelessly transduced from measurement electrodes connected to a microfabricated coil in a flexible thin film substrate. This technique is widely applicable for resistive transduction… 


An electrochemical-based thermal flow sensor
The first thermal flow sensor to operate on the principle of measuring thermal changes in ionic mobility vis-à-vis electrochemical impedance resulting from flow was developed and demonstrated. Its
An implantable all-Parylene liquid-impedance based MEMS force sensor
We present a new transducer paradigm based on the electrochemical impedance transduction capability of encapsulated liquids within Parylene-based MEMS structures. We demonstrate the ability to
Theoretical Background of Electrochemical Analysis
An electrode is a conductor or semiconductor, which directly contacts the electrolyte solution. In an electrochemical system, the input and output are both realized through an electrode. The
Design and Testing of an Impedance-Based Sensor for Monitoring Drug Delivery
A new impedance-based sensor to monitor drug delivery from an implantable microelectromechanical systems (MEMS) device has been fabricated and tested. The sensor consists of two electrodes on
The Packaging of Implantable Integrated Sensors
  • L. Bowman, J. Meindl
  • Computer Science, Medicine
    IEEE Transactions on Biomedical Engineering
  • 1986
The problem of packaging these implantable integrated sensors outside of hermetically sealed hybrid packages is described and a critical, residual aspect of the overall problem is identified: how to make a mechanically rugged and inherently noncorrodible connection between a cable and a thin film on a silicon chip.
Electrochemically-based dose measurement for closed-loop drug delivery applications
We present a method for accurate, real-time tracking of drug dose volume in reservoir-based drug pump systems using electrochemical impedance measurements. Detection of physiologically-relevant drug
Parylene etching techniques for microfluidics and bioMEMS
  • E. Meng, Y. Tai
  • Materials Science
    18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. MEMS 2005.
  • 2005
Parylene C (poly(monochloro-p-xylylene)) is a member of a unique family of thermoplastic, crystalline polymers. Compared to other polymers, parylene films are exceptionally conformal and chemically
Electrochemical sensor for measurement of urea and creatinine in serum based on ac impedance measurement of enzyme-catalyzed polymer transformation.
A polymer, based on poly(methylvinyl ether)/maleic anhydride modified by esterification with n-octanol, which is stable at pH 7.4 and which is transformed rapidly in response to alkaline pH changes, was linked to enzymatic reactions between urease and urea or Creatinine deiminase and creatinine to produce a disposable sensor system.
Plasma removal of Parylene C
Parylene C, an emerging material in microelectromechanical systems, is of particular interest in biomedical and lab-on-a-chip applications where stable, chemically inert surfaces are desired.
Monolithic transformers for silicon RF IC design
  • J. Long
  • Computer Science
    IEEE Journal of Solid-State Circuits
  • 2000
A comprehensive review of the electrical performance of passive transformers fabricated in silicon IC technology is presented, and the characteristics of two-port and multiport transformers and baluns are presented from both computer simulation and experimental measurements.