• Corpus ID: 14747441

A COMPREHENSIVE MICRO-NANOMECHANICAL DRIFT MODELING AND COMPENSATION FOR NANOROBOTS

@article{Korayem2010ACM,
  title={A COMPREHENSIVE MICRO-NANOMECHANICAL DRIFT MODELING AND COMPENSATION FOR NANOROBOTS},
  author={Moharam Habibnejad Korayem and Sadegh Sadeghzadeh},
  journal={Scientia Iranica},
  year={2010},
  volume={17},
  pages={133-147}
}
This paper introduces a new approach for complete drift modeling and compensation for Scanning Probe Microscopes (SPMs) as conventional nanorobots. Although, before this, drift was described as remained error after hysteresis and creep compensation, it can seriously affect SPM performance. Since experimental work accentuated that thermal strain has a dominant contribution, the present model includes only thermal effects. As a signi cant contribution, an analytical relationship is introduced… 

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