A COMPREHENSIVE MICRO-NANOMECHANICAL DRIFT MODELING AND COMPENSATION FOR NANOROBOTS
@article{Korayem2010ACM, title={A COMPREHENSIVE MICRO-NANOMECHANICAL DRIFT MODELING AND COMPENSATION FOR NANOROBOTS}, author={Moharam Habibnejad Korayem and Sadegh Sadeghzadeh}, journal={Scientia Iranica}, year={2010}, volume={17}, pages={133-147} }
This paper introduces a new approach for complete drift modeling and compensation for
Scanning Probe Microscopes (SPMs) as conventional nanorobots. Although, before this, drift was described
as remained error after hysteresis and creep compensation, it can seriously affect SPM performance.
Since experimental work accentuated that thermal strain has a dominant contribution, the present model
includes only thermal effects. As a signi cant contribution, an analytical relationship is introduced…
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