A CMOS sensor array IC for Van der Waals enhanced MOSFET and Taguchi type sensors

@article{Sonkusale2004ACS,
  title={A CMOS sensor array IC for Van der Waals enhanced MOSFET and Taguchi type sensors},
  author={S. R. Sonkusale and L. Stephen Kish and M. Cheng and W. Marlow and Youngbok Kim and Amit Agarwal},
  journal={Proceedings of IEEE Sensors, 2004.},
  year={2004},
  pages={981-984 vol.2}
}
A CMOS sensor array IC capable of performing fluctuation enhanced sensing for two different chemical sensing devices has been designed. The targeted sensing devices are the novel Van der Waals force enhanced MOSFET for gas and nano-particle detection and sputtered ZnO thin films as Taguchi-type sensors for gas detection. The sensor output contains information in the dynamic stochastic fluctuations around the mean value which prove useful for detection of sub-ppm concentrations of gaseous… CONTINUE READING
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