A Bandpass ΔΣ Interface IC for Sacrificial Bulk Micromachined Inertial Sensors


A bandpass ΔΣ interface IC for sacrificial bulk micromachined inertial sensors is presented. To achieve high resolution without precision analog circuits, the proposed architecture replaces the analog mixer of a chopper-stabilized readout amplifier with a 1-bit, 4th-order bandpass ΔΣ modulator and a digital decimator… (More)


10 Figures and Tables