A 9.1 mW inductive displacement-to-digital converter with 1.85 nm resolution
@article{Chaturvedi2017A9M, title={A 9.1 mW inductive displacement-to-digital converter with 1.85 nm resolution}, author={Vikram Chaturvedi and J. Vogel and K. Makinwa and S. Nihtianov}, journal={2017 Symposium on VLSI Circuits}, year={2017}, pages={C80-C81} }
A displacement-to-digital converter (DDC) based on inductive (eddy-current) sensor is presented. The sensor is embedded in a self-oscillating front-end, whose 145MHz output is then digitized by a ratiometric ΔΣ ADC. Over a 10μm range, the DDC achieves 1.85nm resolution (1.02 pH), in a 2kHz bandwidth. It draws 9.1mW from a 1.8 V supply making it the most energy-efficient ECS interface ever reported.
Figures from this paper
Figures
5 Citations
A 117DB in-Band CMRR 98.5DB SNR Capacitance-to-Digital Converter for Sub-NM Displacement Sensing with an Electrically Floating Target
- Materials Science, Computer Science
- 2018 IEEE Symposium on VLSI Circuits
- 2018
- 3
Auto-alignment of a High-Precision Eddy-current Displacement Sensor Using a Thermal Slider Actuator
- 2018
- PDF
Probe Design for High-Precision Eddy-Current Displacement Sensors
- Materials Science, Computer Science
- IECON 2018 - 44th Annual Conference of the IEEE Industrial Electronics Society
- 2018
- 2
A 117-dB In-Band CMRR 98.5-dB SNR Capacitance-to-Digital Converter for Sub-nm Displacement Sensing With an Electrically Floating Target
- Physics, Materials Science
- IEEE Solid-State Circuits Letters
- 2020
- 1
Advances in Capacitive, Eddy Current, and Magnetic Displacement Sensors and Corresponding Interfaces
- Engineering, Computer Science
- IEEE Transactions on Industrial Electronics
- 2017
- 32