A 9.1 mW inductive displacement-to-digital converter with 1.85 nm resolution

  title={A 9.1 mW inductive displacement-to-digital converter with 1.85 nm resolution},
  author={Vikram Chaturvedi and J. Vogel and K. Makinwa and S. Nihtianov},
  journal={2017 Symposium on VLSI Circuits},
  • Vikram Chaturvedi, J. Vogel, +1 author S. Nihtianov
  • Published 2017
  • Engineering
  • 2017 Symposium on VLSI Circuits
  • A displacement-to-digital converter (DDC) based on inductive (eddy-current) sensor is presented. The sensor is embedded in a self-oscillating front-end, whose 145MHz output is then digitized by a ratiometric ΔΣ ADC. Over a 10μm range, the DDC achieves 1.85nm resolution (1.02 pH), in a 2kHz bandwidth. It draws 9.1mW from a 1.8 V supply making it the most energy-efficient ECS interface ever reported. 
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