A 70nm NOR flash technology with 0.049 /spl mu/m/sup 2/ cell size

Abstract

A 70nm NOR flash technology has been for the first time developed with a cell size of 0.0494m, which is the smallest size of NOR flash cell, for high density memory of mobile application. The operation of 0.049PM cell transistor is successfully achieved with three key technologies such as an optimized Self-Aligned Poly (SAP) structure with top corner… (More)

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