Corpus ID: 14433305

A 4.5-mW Closed-Loop Micro-Gravity CMOS SOI Accelerometer

  title={A 4.5-mW Closed-Loop Micro-Gravity CMOS SOI Accelerometer},
  author={Babak Vakili Amini and R. Abdolvand and F. Ayazi},
  • Babak Vakili Amini, R. Abdolvand, F. Ayazi
  • Published 2006
  • Computer Science
  • In this paper, design, implementation and character- ization of a 3-V switched-capacitor (SC) CMOS interface cir- cuit for the closed-loop operation of a lateral capacitive micro- gravity silicon-on-insulator (SOI) accelerometer is presented. [...] Key Method The accelerometer is fabricated through a dry-re- lease high aspect-ratio reduced-gap process.Expand Abstract
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    Publications referenced by this paper.
    Micro-gravity capacitive silicon-on-insulator accelerometers
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    • Open Access
    Sub-micro-gravity capacitive SOI microaccelerometers
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    A 2.5V 14-bit ΣΔ CMOS-SOI capacitive accelerometer
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    17.6 A Fourth-Order Σ∆ Interface for Micromachined Inertial Sensors
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    • Open Access