Corpus ID: 14433305

A 4.5-mW Closed-Loop Micro-Gravity CMOS SOI Accelerometer

@inproceedings{Amini2006A4C,
  title={A 4.5-mW Closed-Loop Micro-Gravity CMOS SOI Accelerometer},
  author={B. V. Amini and R. Abdolvand and F. Ayazi},
  year={2006}
}
In this paper, design, implementation and character- ization of a 3-V switched-capacitor (SC) CMOS interface cir- cuit for the closed-loop operation of a lateral capacitive micro- gravity silicon-on-insulator (SOI) accelerometer is presented. [...] Key Method The accelerometer is fabricated through a dry-re- lease high aspect-ratio reduced-gap process.Expand
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References

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In this paper, design, implementation and characterization of a 3-V switched-capacitor (SC) DeltaSigma CMOS interface circuit for the closed-loop operation of a lateral capacitive micro-gravityExpand
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In this paper, the implementation and characterization of high-sensitivity in-plane capacitive micro-gravity silicon-on-insulator (SOI) accelerometers with the readout circuitry are presented. TheExpand
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  • B.V. Amini, R. Abdolvand, F. Ayazi
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The implementation and preliminary characterization of a new in-plane capacitive microaccelerometer with sub-micro-gravity resolution (<200ng//spl radic/Hz) and very high sensitivity (>15pF/g) isExpand
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  • Materials Science
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