Corpus ID: 14433305

A 4.5-mW Closed-Loop Micro-Gravity CMOS SOI Accelerometer

@inproceedings{Amini2006A4C,
  title={A 4.5-mW Closed-Loop Micro-Gravity CMOS SOI Accelerometer},
  author={Babak Vakili Amini and R. Abdolvand and F. Ayazi},
  year={2006}
}
  • Babak Vakili Amini, R. Abdolvand, F. Ayazi
  • Published 2006
  • Computer Science
  • In this paper, design, implementation and character- ization of a 3-V switched-capacitor (SC) CMOS interface cir- cuit for the closed-loop operation of a lateral capacitive micro- gravity silicon-on-insulator (SOI) accelerometer is presented. [...] Key Method The accelerometer is fabricated through a dry-re- lease high aspect-ratio reduced-gap process.Expand Abstract
    A Micropower $\Delta\Sigma$-Based Interface ASIC for a Capacitive 3-Axis Micro-Accelerometer
    • 34
    Study of closed-loop high-resolution sigma-delta for a MEMS accelerometer
    A High-Performance Digital Interface Circuit for a High-Q Micro-Electromechanical System Accelerometer
    • 8
    • Open Access
    A High-Voltage Closed-Loop SC Interface for a ± 50 g Capacitive Micro-Accelerometer With 112.4 dB Dynamic Range
    • 7
    • Highly Influenced
    A Chopper-Stabilized Lateral-BJT-Input Interface in 0.6μm CMOS for Capacitive Accelerometers
    • 13
    • Open Access
    A closed-loop switched-capacitor interface for high-quality microaccelerometer

    References

    Publications referenced by this paper.
    SHOWING 1-10 OF 30 REFERENCES
    Micro-gravity capacitive silicon-on-insulator accelerometers
    • 83
    • Open Access
    Sub-micro-gravity capacitive SOI microaccelerometers
    • 29
    • Open Access
    A 2.5V 14-bit ΣΔ CMOS-SOI capacitive accelerometer
    • 46
    • Open Access
    17.6 A Fourth-Order Σ∆ Interface for Micromachined Inertial Sensors
    • 109
    • Open Access