A 4.5-mW Closed-Loop $\Delta\Sigma$ Micro-Gravity CMOS SOI Accelerometer

@article{Amini2006A4C,
  title={A 4.5-mW Closed-Loop  \$\Delta\Sigma\$ Micro-Gravity CMOS SOI Accelerometer},
  author={B. V. Amini and Reza Abdolvand and Farrokh Ayazi},
  journal={IEEE Journal of Solid-State Circuits},
  year={2006},
  volume={41},
  pages={2983-2991}
}
In this paper, design, implementation and characterization of a 3-V switched-capacitor (SC) DeltaSigma CMOS interface circuit for the closed-loop operation of a lateral capacitive micro-gravity silicon-on-insulator (SOI) accelerometer is presented. The interface circuit is based on a front-end programmable reference-capacitorless SC charge amplifier and a back-end second-order SC DeltaSigma modulator. The accelerometer is fabricated through a dry-release high aspect-ratio reduced-gap process… CONTINUE READING
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Showing 1-10 of 29 references

A 4.5mW closed-loop Delta-Sigma micro-gravity CMOS SOI accelerometer

  • B. V. Amini, R. Abdolvand, F. Ayazi
  • IEEE ISSCC Dig. Tech. Papers, 2006, pp. 288–289.
  • 2006
1 Excerpt

A high-performance accelerometer with a fifth-order sigma-delta modulator

  • Y. Dong, M. Kraft, C. Gollasch, W. Redman-White
  • J. Micromech. Microeng., vol. 15, no. 7, pp. 22…
  • 2005
1 Excerpt

Evolution of integrated inertial MEMS technology , ” in Tech . Dig

  • M. E. Ruiz-Sandoval
  • 2005

Risk monitoring of buildings with wireless sensor networks

  • N. Kurata, B. F. Spencer, M. E. Ruiz-Sandoval, Jr.
  • Structural Control and Health Monitoring, vol. 12…
  • 2005
1 Excerpt

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