A 4.5-mW Closed-Loop $\Delta\Sigma$ Micro-Gravity CMOS SOI Accelerometer

  title={A 4.5-mW Closed-Loop  \$\Delta\Sigma\$ Micro-Gravity CMOS SOI Accelerometer},
  author={B. V. Amini and Reza Abdolvand and Farrokh Ayazi},
  journal={IEEE Journal of Solid-State Circuits},
In this paper, design, implementation and characterization of a 3-V switched-capacitor (SC) DeltaSigma CMOS interface circuit for the closed-loop operation of a lateral capacitive micro-gravity silicon-on-insulator (SOI) accelerometer is presented. The interface circuit is based on a front-end programmable reference-capacitorless SC charge amplifier and a back-end second-order SC DeltaSigma modulator. The accelerometer is fabricated through a dry-release high aspect-ratio reduced-gap process… CONTINUE READING
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