A 3D thermal simulation tool for integrated devices-Atar

Abstract

This paper presents a novel 3D thermal simulation tool for semiconductor integrated devices. The simulator is used to automatically generate an accurate 3D physical model of the device to be simulated from layout information. The simulator produces an appropriate mesh of the device based on a rectangular block structure. The mesh is automatically created… (More)
DOI: 10.1109/43.905679

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@article{Smy2001A3T, title={A 3D thermal simulation tool for integrated devices-Atar}, author={Tom J. Smy and David J. Walkey and Steven K. Dew}, journal={IEEE Trans. on CAD of Integrated Circuits and Systems}, year={2001}, volume={20}, pages={105-115} }