A 2 Degree-of-Freedom SOI-MEMS Translation Stage With Closed-Loop Positioning


This paper presents the design, analysis, fabrication, and characterization of a closed-loop XY micropositioning stage. The stage design is based on a 2 degree-of-freedom parallel kinematic mechanism with linear characteristics. Integrated with sensing combs, and fabricated in SOI wafers, the design provides a promising pathway to closed-loop positioning… (More)


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