A 19.8-mW Eddy-Current Displacement Sensor Interface With Sub-Nanometer Resolution

  title={A 19.8-mW Eddy-Current Displacement Sensor Interface With Sub-Nanometer Resolution},
  author={Vikram Chaturvedi and J. Vogel and K. Makinwa and S. Nihtianov},
  journal={IEEE Journal of Solid-State Circuits},
  • Vikram Chaturvedi, J. Vogel, +1 author S. Nihtianov
  • Published 2018
  • Materials Science, Computer Science
  • IEEE Journal of Solid-State Circuits
  • This paper presents an eddy-current sensor (ECS) interface intended for sub-nanometer (sub-nm) displacement sensing in hi-tech applications. The interface employs a 126-MHz excitation frequency to mitigate the skin effect, and achieve high resolution and stability. An efficient on-chip sensor offset compensation scheme is introduced which removes sensor-offset proportional to the standoff distance. To assist in the ratiometric suppression of noise and drift of the excitation oscillator, the ECS… CONTINUE READING
    6 Citations


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