A 19.8-mW Eddy-Current Displacement Sensor Interface With Sub-Nanometer Resolution

@article{Chaturvedi2018A1E,
  title={A 19.8-mW Eddy-Current Displacement Sensor Interface With Sub-Nanometer Resolution},
  author={Vikram Chaturvedi and J. Vogel and K. Makinwa and S. Nihtianov},
  journal={IEEE Journal of Solid-State Circuits},
  year={2018},
  volume={53},
  pages={2273-2283}
}
  • Vikram Chaturvedi, J. Vogel, +1 author S. Nihtianov
  • Published 2018
  • Materials Science, Computer Science
  • IEEE Journal of Solid-State Circuits
  • This paper presents an eddy-current sensor (ECS) interface intended for sub-nanometer (sub-nm) displacement sensing in hi-tech applications. The interface employs a 126-MHz excitation frequency to mitigate the skin effect, and achieve high resolution and stability. An efficient on-chip sensor offset compensation scheme is introduced which removes sensor-offset proportional to the standoff distance. To assist in the ratiometric suppression of noise and drift of the excitation oscillator, the ECS… CONTINUE READING
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    References

    SHOWING 1-10 OF 40 REFERENCES
    A Novel Interface for Eddy Current Displacement Sensors
    • 34
    • PDF
    9.9 A 0.6nm resolution 19.8mW eddy-current displacement sensor interface with 126MHz excitation
    • 4
    An interface for eddy current displacement sensors with 15-bit resolution and 20 MHz excitation
    • 17
    Eddy-Current Sensor Interface for Advanced Industrial Applications
    • 51
    Power-Efficient High-Speed and High-Resolution Capacitive-Sensor Interface for Subnanometer Displacement Measurements
    • S. Xia, S. Nihtianov
    • Engineering, Computer Science
    • IEEE Transactions on Instrumentation and Measurement
    • 2012
    • 28
    An eddy-current displacement-to-digital converter based on a ratio-metric delta-sigma ADC
    • 10
    Demodulation Techniques for Self-Oscillating Eddy-Current Displacement Sensor Interfaces: A Review
    • 11
    A capacitance-to-digital converter for displacement sensing with 17b resolution and 20μs conversion time
    • 96
    Eddy-Current Displacement Transducer With Extended Linear Range and Automatic Tuning
    • D. Vyroubal
    • Computer Science, Mathematics
    • IEEE Transactions on Instrumentation and Measurement
    • 2009
    • 28
    • PDF