A 19-element Shock Sensor Array for Bi-directional Substrate-plane Sensing Fabricated by Sacrificial Liga

@inproceedings{McNamara2001A1S,
  title={A 19-element Shock Sensor Array for Bi-directional Substrate-plane Sensing Fabricated by Sacrificial Liga},
  author={Shamus McNamara and Yogesh B. Gianchandani},
  year={2001}
}
The design, fabrication and testing of a micromachined shock sensor array is described. The sense elements are cantilevers which deflect parallel to the substrate and close a switch when a threshold acceleration is detected. Criteria for their dimensional optimization are presented. The dynamic range for the array is 10 g to 150 g, with a resolution of 10 g… CONTINUE READING